Machine qualification management for a semiconductor back-end facility

Mengying Fu, Moeed Haghnevis, Ronald Askin, John Fowler, Muhong Zhang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

13 Scopus citations


In order to process a product in a semiconductor back-end facility, a machine needs to be qualified first by having a product-specific software program installed on it. Then a tool set must be available and attached on the machine while it is processing the product. In general not all machines are qualified to process all products due to the high machine qualification cost and tool set availability. However, the machine qualification decision is very important because it affects capacity allocation in the facility and subsequently affects daily production scheduling. To balance the tradeoff between the machine qualification costs and backorder costs, a product-machine qualification optimization model is proposed in this paper.

Original languageEnglish (US)
Title of host publicationProceedings of the 2010 Winter Simulation Conference, WSC'10
Number of pages7
StatePublished - 2010
Event2010 43rd Winter Simulation Conference, WSC'10 - Baltimore, MD, United States
Duration: Dec 5 2010Dec 8 2010

Publication series

NameProceedings - Winter Simulation Conference
ISSN (Print)0891-7736


Other2010 43rd Winter Simulation Conference, WSC'10
Country/TerritoryUnited States
CityBaltimore, MD

ASJC Scopus subject areas

  • Software
  • Modeling and Simulation
  • Computer Science Applications


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