Low temperature ECR-CVD of (Ba,Sr)TiO 3 films

Prasad Alluri, Derek Tang, Sandwip Dey

Research output: Chapter in Book/Report/Conference proceedingChapter


This paper reports the deposition of polycrystalline SrTiO 3 at 390 °C by using ECR-plasma CVD and direct liquid injection. The formation of crystalline (Ba,Sr)TiO 3 thin films at low temperatures is hindered by the formation of the BaCO 3 phase. To reduce the carbonate phase, it is necessary to use excess oxygen partial pressures at the expense of the deposition rate. It is also demonstrated that thermodynamic phase stability diagrams can be used as guidelines for implementing CVD experiments.

Original languageEnglish (US)
Title of host publicationIntegrated Ferroelectrics
Number of pages10
StatePublished - 1998


  • (Ba,Sr)TiO
  • CVD
  • Direct liquid injection
  • ECR
  • Phase stability diagram
  • SrTiO

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Physics and Astronomy (miscellaneous)
  • Condensed Matter Physics


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