Low-cost spray deposited ZrO2 for passivation and antireflection on p-type Si

Woo Jung Shin, Laidong Wang, Meng Tao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations


In this study, we use low-cost spray deposition to study the possibility of using an earth-abundant ZrO2 film as a antireflection and passivation layer on p-type Si. Structural, optical and electrical properties of the spray-deposited ZrO2 film were investigated. Spray deposited ZrO2 is highly transparent with a refractive index of 2 at 600 nm wavelength. Reflectance and transmittance spectra of ZrO2 films reveal that the optical properties of spray-deposited ZrO2 are comparable to, and in some cases slightly better than, PECVD SiNx. Capacitance-voltage measurements show that spray-deposited ZrO2 films have negative charges with a charge density of 1.07×1012 cm-2. These results suggest that spray-deposited ZrO2 could be a suitable material for antireflection and passivation on p-type Si in Si solar cells.

Original languageEnglish (US)
Title of host publication2016 IEEE 43rd Photovoltaic Specialists Conference, PVSC 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages4
ISBN (Electronic)9781509027248
StatePublished - Nov 18 2016
Event43rd IEEE Photovoltaic Specialists Conference, PVSC 2016 - Portland, United States
Duration: Jun 5 2016Jun 10 2016

Publication series

NameConference Record of the IEEE Photovoltaic Specialists Conference
ISSN (Print)0160-8371


Other43rd IEEE Photovoltaic Specialists Conference, PVSC 2016
Country/TerritoryUnited States

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering


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