Low-cost spray-deposited ZrO 2 for antireflection in Si solar cells

Woo Jung Shin, Wen Hsi Huang, Meng Tao

Research output: Contribution to journalArticlepeer-review

10 Scopus citations


Low-cost spray deposition is employed to investigate the possibility of using earth-abundant ZrO 2 as the antireflection coating in Si solar cells. Structural, optical, and electrical properties of spray-deposited ZrO 2 films are investigated. Spray-deposited ZrO 2 is highly transparent with a refractive index of 2.0 at 600 nm. Reflection and transmission spectra of ZrO 2 films reveal that the optical properties of spray-deposited ZrO 2 are comparable to SiN x deposited by plasma-enhanced chemical vapor deposition. Atomic force microscopy studies show that spray-deposited ZrO 2 is crack/pore-free and its surface roughness has a root-mean-square value of 0.7 nm for a 75-nm film. Spray-deposited ZrO 2 at 550 °C is polycrystalline with a cubic lattice but largely amorphous at 450 °C as determined by X-ray diffraction. Capacitance-voltage measurements indicate that spray-deposited ZrO 2 has a negative charge density of 8.19 × 10 11 cm −2 for a 75-nm film. Post-deposition annealing results in a significant decrease in oxide capacitance which is attributed to the formation of SiO 2 at the ZrO 2 /Si interface. The resistivity of as-deposited ZrO 2 is 3.69 × 10 12 Ω-cm and it improves to 2.46 × 10 13 Ω-cm after post-deposition annealing in air at 600 °C for 1 h.

Original languageEnglish (US)
Pages (from-to)37-43
Number of pages7
JournalMaterials Chemistry and Physics
StatePublished - May 15 2019

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics


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