Leakage currents in S1-xGex virtual substrates: Measurements and device implications

S. Kanjanachuchai, T. J. Thornton, J. M. Fernández, H. Ahmed

Research output: Contribution to journalArticlepeer-review

12 Scopus citations


Leakage currents originating in the Si1-xGex virtual substrates which are required in many Si heterostructure systems have been measured. Both ohmic (AuSb) and Schottky (Pt) contacts to a modulation-doped Si:SiGe heterostructure show significant leakage when the contacts cover deep pits originating from growth defects and contaminants. Shallower pits emerging later in the growth process do not contribute to extra conduction. These pits appear after growth of the graded Si1-xGex layer which leads us to conclude that carrier transport from the contact along the dense network of dislocations formed in the graded buffer layer is responsible for the leakage found in Si:SiGe systems making use of virtual substrates.

Original languageEnglish (US)
Pages (from-to)1215-1218
Number of pages4
JournalSemiconductor Science and Technology
Issue number10
StatePublished - Oct 1 1998
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry


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