@inproceedings{9dfb4c2864fb4394b10b42562484a0c0,
title = "Laser micromachining of thin-film polyimide microelectrode arrays: Alternative processes to photolithography",
abstract = "Thin-film microelectrode arrays have a wide variety of applications in research and medical devices. Conventionally, these arrays are fabricated through the use of photolithography, which can be problematic for innovative medical device fabrication due to long process times, inflexibility to design changes, and the reliance on potentially harmful chemicals. Here, we present the use of laser micromachining as an alternative to photolithography processes to fabricate thin-film polyimide microelectrode arrays. This fabrication method lends itself to an iterative design process as it can reduce fabrication steps and is attractive for medical devices since it can be used without harmful chemicals. Several process parameters were explored and the performance of the fabricated electrodes was compared to similar electrodes that were fabricated with conventional photolithography processes.",
keywords = "Femtosecond laser, Microfabrication, Polyimide, Thin-film microelectrode array",
author = "Yeh, {Hsiang Lan} and Garich, {Jonathan V.} and Akamine, {Ian R.} and Blain-Christen, {Jennifer M.} and Hara, {Seth A.}",
note = "Publisher Copyright: Copyright {\textcopyright} 2020 ASME; 2020 Design of Medical Devices Conference, DMD 2020 ; Conference date: 06-04-2020 Through 09-04-2020",
year = "2020",
doi = "10.1115/DMD2020-9057",
language = "English (US)",
series = "Frontiers in Biomedical Devices, BIOMED - 2020 Design of Medical Devices Conference, DMD 2020",
publisher = "American Society of Mechanical Engineers (ASME)",
booktitle = "Frontiers in Biomedical Devices, BIOMED - 2020 Design of Medical Devices Conference, DMD 2020",
}