Ion-irradiation enhanced epitaxial growth of sol-gel TiO2 films

Jung Kun Lee, Hyun Suk Jung, Yongqiang Wang, N. David Theodore, Terry Alford, Michael Nastasi

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


We report the epitaxial growth of sol-gel TiO2 films by using ion-irradiation enhanced synthesis. Our present study shows that the ion-beam process can provide highly crystalline TiO2 even at 350°C. Nuclear energy deposition at amorphous/crystalline interface plays a dominant role in the epitaxial growth of the films at the reduced temperature via a defect-migration mechanism. In addition, the ion irradiation allows for increasing the film density by balancing the crystallization rate and the escape rate of organic components.

Original languageEnglish (US)
Pages (from-to)179-184
Number of pages6
JournalApplied Physics A: Materials Science and Processing
Issue number1
StatePublished - Apr 2011

ASJC Scopus subject areas

  • General Chemistry
  • General Materials Science


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