Investigations of Rh-based multilayers for soft x-ray applications by high-resolution electron microscopy

Z. G. Li; David Smith; S. C Y Tsen; P. Boher; Ph Houdy

doi:10.1063/1.349314

Investigations of Rh-based multilayers for soft x-ray applications by high-resolution electron microscopy

Z. G. Li, David Smith, S. C Y Tsen, P. Boher, Ph Houdy

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Abstract

A series of rhodium-based multilayer structures has been developed for soft x-ray applications by using "trilayer" structures and low density boron carbide spacing material. The microstructure of the multilayers was investigated by high-resolution electron microscopy and compared with those of tungsten- and nickel-based multilayers. Rh crystals having fcc structure but with different preferred orientations were identified in Rh-based layers. It was confirmed that the major limitation on the performance of the multilayer materials was the crystallization of the metal layers. High reflectivity and selectivity for x-ray mirrors was obtained in the case of W/Rh/C multilayers due to significant improvement in their microstructure, especially the interface roughness.

Original language	English (US)
Pages (from-to)	2905-2910
Number of pages	6
Journal	Journal of Applied Physics
Volume	70
Issue number	6
DOIs	https://doi.org/10.1063/1.349314
State	Published - 1991

ASJC Scopus subject areas

General Physics and Astronomy

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10.1063/1.349314

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title = "Investigations of Rh-based multilayers for soft x-ray applications by high-resolution electron microscopy",

abstract = "A series of rhodium-based multilayer structures has been developed for soft x-ray applications by using {"}trilayer{"} structures and low density boron carbide spacing material. The microstructure of the multilayers was investigated by high-resolution electron microscopy and compared with those of tungsten- and nickel-based multilayers. Rh crystals having fcc structure but with different preferred orientations were identified in Rh-based layers. It was confirmed that the major limitation on the performance of the multilayer materials was the crystallization of the metal layers. High reflectivity and selectivity for x-ray mirrors was obtained in the case of W/Rh/C multilayers due to significant improvement in their microstructure, especially the interface roughness.",

author = "Li, {Z. G.} and David Smith and Tsen, {S. C Y} and P. Boher and Ph Houdy",

year = "1991",

doi = "10.1063/1.349314",

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T1 - Investigations of Rh-based multilayers for soft x-ray applications by high-resolution electron microscopy

AU - Li, Z. G.

AU - Smith, David

AU - Tsen, S. C Y

AU - Boher, P.

AU - Houdy, Ph

PY - 1991

Y1 - 1991

N2 - A series of rhodium-based multilayer structures has been developed for soft x-ray applications by using "trilayer" structures and low density boron carbide spacing material. The microstructure of the multilayers was investigated by high-resolution electron microscopy and compared with those of tungsten- and nickel-based multilayers. Rh crystals having fcc structure but with different preferred orientations were identified in Rh-based layers. It was confirmed that the major limitation on the performance of the multilayer materials was the crystallization of the metal layers. High reflectivity and selectivity for x-ray mirrors was obtained in the case of W/Rh/C multilayers due to significant improvement in their microstructure, especially the interface roughness.

AB - A series of rhodium-based multilayer structures has been developed for soft x-ray applications by using "trilayer" structures and low density boron carbide spacing material. The microstructure of the multilayers was investigated by high-resolution electron microscopy and compared with those of tungsten- and nickel-based multilayers. Rh crystals having fcc structure but with different preferred orientations were identified in Rh-based layers. It was confirmed that the major limitation on the performance of the multilayer materials was the crystallization of the metal layers. High reflectivity and selectivity for x-ray mirrors was obtained in the case of W/Rh/C multilayers due to significant improvement in their microstructure, especially the interface roughness.

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JO - Journal of Applied Physics

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Investigations of Rh-based multilayers for soft x-ray applications by high-resolution electron microscopy

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