Abstract
This paper studies simultaneous scheduling of production and material transfer that arises in the semiconductor photolithography area. In particular, the right reticle and right job both need to be present to process the job. Jobs are transferred by a material handling system that employees a fleet of vehicles. Reticles serving as an auxiliary resource are also transferred from one place to another by a different set of vehicles. This intricate scheduling challenge, encompassing jobs, reticles, machines, and two distinct sets of vehicles, is explored here for the first time. The paper introduces a multi-stage methodology that involves relaxation, a constructive heuristic, constraint programming, and a warm-start approach to address this complex problem.
Original language | English (US) |
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Pages (from-to) | 27-37 |
Number of pages | 11 |
Journal | IEEE Transactions on Semiconductor Manufacturing |
Volume | 37 |
Issue number | 1 |
DOIs | |
State | Published - Feb 1 2024 |
Externally published | Yes |
Keywords
- Robot task scheduling
- constraint programming
- lithography
- reticle
- simultaneous scheduling
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Industrial and Manufacturing Engineering
- Electrical and Electronic Engineering