@inproceedings{beb9f64d3ee34bd2a585da461ccbe5ea,
title = "Integrated Scheduling of Jobs, Reticles, Machines, AMHS and ARHS in a Semiconductor Manufacturing",
abstract = "This paper studies simultaneous scheduling of production and material transfer in the semiconductor photolithography area. In particular, jobs are transferred by a material handling system that employees a fleet of vehicles. Reticles serving as an auxiliary resource are also transferred from one place to another by a different set of vehicles. The extremely complex scheduling problem that includes jobs, reticles, machines, and two different sets of vehicles is (apparently) studied for the first time. A novel constraint programming model is proposed.",
author = "Andy Ham and Park, {Myoung Ju} and Shin, {Ho Jun} and Choi, {Si Young} and Fowler, {John W.}",
note = "Funding Information: This research has been partially supported by CSPI Corporation. Publisher Copyright: {\textcopyright} 2020 IEEE.; 2020 Winter Simulation Conference, WSC 2020 ; Conference date: 14-12-2020 Through 18-12-2020",
year = "2020",
month = dec,
day = "14",
doi = "10.1109/WSC48552.2020.9384027",
language = "English (US)",
series = "Proceedings - Winter Simulation Conference",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1966--1973",
editor = "K.-H. Bae and B. Feng and S. Kim and S. Lazarova-Molnar and Z. Zheng and T. Roeder and R. Thiesing",
booktitle = "Proceedings of the 2020 Winter Simulation Conference, WSC 2020",
}