Inert gas clusters ejected from bursting bubbles during sputtering

Klaus Franzreb; Peter Williams

Inert gas clusters ejected from bursting bubbles during sputtering

Klaus Franzreb, Peter Williams

Molecular Sciences, School of (SMS)

Research output: Contribution to journal › Article › peer-review

17 Scopus citations

Abstract

The emission and ion formation mechanisms leading to the observation of Ar_n⁺(n≤6) and Xe₂⁺ from sputtered surfaces and show that these species arise from expansion cooling of gas from ruptured bubbles producing neutral clusters, followed by gas-phase ionization by resonant charge exchange. Laurent et al. first observed Ar_n⁺ in a secondary ion mass spectrometry (SIMS) study of Ar⁺-sputtered heated A1 and noted that cluster ion formation must be due to rupture of bubbles during material removal by sputtering.

Original language	English (US)
Article number	015501
Pages (from-to)	015501/1-015501/4
Journal	Physical Review Letters
Volume	91
Issue number	1
State	Published - Jul 4 2003

ASJC Scopus subject areas

General Physics and Astronomy

Cite this

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title = "Inert gas clusters ejected from bursting bubbles during sputtering",

abstract = "The emission and ion formation mechanisms leading to the observation of Arn+(n≤6) and Xe2+ from sputtered surfaces and show that these species arise from expansion cooling of gas from ruptured bubbles producing neutral clusters, followed by gas-phase ionization by resonant charge exchange. Laurent et al. first observed Arn+ in a secondary ion mass spectrometry (SIMS) study of Ar+-sputtered heated A1 and noted that cluster ion formation must be due to rupture of bubbles during material removal by sputtering.",

author = "Klaus Franzreb and Peter Williams",

note = "Funding Information: This work was supported by NSF Grant No. CHE 0111654. We thank Professor Georges Slodzian for informing us of the early work in his group, and Dr. Marc Bernheim for having provided us with a copy of his Ph.D. thesis. Erika Duda, Lynda Williams, and Rick Hervig also contributed to this work.",

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AU - Williams, Peter

N1 - Funding Information: This work was supported by NSF Grant No. CHE 0111654. We thank Professor Georges Slodzian for informing us of the early work in his group, and Dr. Marc Bernheim for having provided us with a copy of his Ph.D. thesis. Erika Duda, Lynda Williams, and Rick Hervig also contributed to this work.

PY - 2003/7/4

Y1 - 2003/7/4

N2 - The emission and ion formation mechanisms leading to the observation of Arn+(n≤6) and Xe2+ from sputtered surfaces and show that these species arise from expansion cooling of gas from ruptured bubbles producing neutral clusters, followed by gas-phase ionization by resonant charge exchange. Laurent et al. first observed Arn+ in a secondary ion mass spectrometry (SIMS) study of Ar+-sputtered heated A1 and noted that cluster ion formation must be due to rupture of bubbles during material removal by sputtering.

AB - The emission and ion formation mechanisms leading to the observation of Arn+(n≤6) and Xe2+ from sputtered surfaces and show that these species arise from expansion cooling of gas from ruptured bubbles producing neutral clusters, followed by gas-phase ionization by resonant charge exchange. Laurent et al. first observed Arn+ in a secondary ion mass spectrometry (SIMS) study of Ar+-sputtered heated A1 and noted that cluster ion formation must be due to rupture of bubbles during material removal by sputtering.

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Inert gas clusters ejected from bursting bubbles during sputtering

Abstract

ASJC Scopus subject areas

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