Abstract
In this work, we report the improvement of high frequency response and quality factor of on-chip inductors by integrating ferromagnetic thin films (Co-Zr-Ta-B) including two different combinations of laminations and 500 nm thick non-laminated film. Up to 4.2X increase in inductance and 5X increase in quality factor (Q) was obtained from 4-turn spiral inductors incorporated with 50 nm by 10 laminated films with a peak Q at 500 MHz. Effects of patterning magnetic film have also been investigated by changing magnetic thin film aspect ratio. It was demonstrated that the peak Q can be pushed towards using higher frequencies as high as 1 GHz by a combination of patterning magnetic films into fine bars and laminations.
Original language | English (US) |
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Article number | 6559171 |
Pages (from-to) | 4176-4179 |
Number of pages | 4 |
Journal | IEEE Transactions on Magnetics |
Volume | 49 |
Issue number | 7 |
DOIs | |
State | Published - 2013 |
Keywords
- Magnetic thin film
- On-chip inductors
- Patterned laminations
- Radio frequency (RF)
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering