Abstract
A brief review is given of studies of surfaces and small particles using electron beam techniques. The principal tools are secondary, Auger and backscattered electrons, either energy-filtered using various types of analyzers, or as a stronger signal with coarser energy filtering. These tools have been deployed in wide-beam surface science instruments, but also increasingly in scanning electron and scanning transmission electron microscopes, especially in ultra-high vacuum instruments capable of analyzing clean surfaces. The different choices that need to be made are illustrated with examples of clean surfaces, thin films and catalyst particles at high spatial resolution.
Original language | English (US) |
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Pages (from-to) | 205-218 |
Number of pages | 14 |
Journal | Journal of Electron Spectroscopy and Related Phenomena |
Volume | 143 |
Issue number | 2-3 SPEC. ISS. |
DOIs | |
State | Published - May 2005 |
Externally published | Yes |
Keywords
- Auger electrons
- Backscattered electrons
- Secondary electrons
- Small particle catalysts
- Surfaces
- UHV electron microscopy
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Radiation
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Spectroscopy
- Physical and Theoretical Chemistry