2 Scopus citations


The integration of voltage regulator on the chip substrate in system on chip can reduce interconnect resistive losses, facilitates real-time power management with control of the supply voltage, and requires to manufacture small inductors with high inductance density, power density, and efficiency with large current carrying capability. In this paper, we fabricated a strip-line on-chip inductor with separate conductive windings wrapped by boron-incorporated amorphous Co-Zr-Ta-B film. We examined its response of inductance and quality factor as a function of an applied dc current and its large current density capability.

Original languageEnglish (US)
Article number7436806
JournalIEEE Transactions on Magnetics
Issue number7
StatePublished - Jul 2016


  • CoZrTaB thin film
  • current density
  • on-chip inductors
  • voltage regulator

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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