Guidelines to the application of nuclear resonance to quantitative thin film analysis

S. W. Russell, T. E. Levine, A. E. Bair, Terry Alford

Research output: Contribution to journalArticlepeer-review

12 Scopus citations


The use of elastic nuclear resonances, including 12C(α, α)12C, 14N(α, α)14N and 16O(α, α)16O, provide a useful means of enhancing the sensitivity toward light elements using the same experimental setup as for Rutherford backscattering. Quantitative information about light element concentrations is only obtainable under certain conditions, and the use of simulation programs in conjunction with resonance analysis may often lead to erroneous results. By using resonance near the peak value of the cross section one may enhance sensitivity; however, this may result in a loss of precision, defined as day-to-day repeatability of the measurement. Conversely, using resonance in an energy regime in which the cross section varies less rapidly may more accurately predict the actual composition than standard RBS but prove less useful for low concentrations. We explore the importance of film thickness and composition and the variation in the incident beam energy toward the selection of the appropriate resonance regime, as well as discuss common sources of error.

Original languageEnglish (US)
Pages (from-to)201-205
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Issue number1-4
StatePublished - Sep 1996

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation


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