Growth parameter enhancement for MoS2 thin films synthesized by pulsed laser deposition

Martha I. Serna, Salvador Moreno, Marissa Higgins, Hyunjoo Choi, Majid Minary-Jolandan, Manuel A. Quevedo-Lopez

Research output: Contribution to journalArticlepeer-review

9 Scopus citations


Two-dimensional materials such as graphene and MoS2 have been the main focus of intense research efforts over the past few years. The most common method of exfoliating these materials, although efficient for lab-scale experiments, is not acceptable for large area and practical applications. Here, we report the deposition of MoS2 layered films on amorphous (SiO2) and crystalline substrates (sapphire) using a pulsed laser deposition (PLD) method. Increased substrate temperature (∼700 °C) and laser energy density (>530 mJ /cm2) promotes crystalline MoS2 films < 20 nm, as demonstrated by fast Fourier transform (FFT) and transmission electron microscopy (TEM). The method reported here opens the possibility for large area layered MoS2 films by using a laser ablation processes.

Original languageEnglish (US)
Pages (from-to)848-854
Number of pages7
JournalPhysica Status Solidi (C) Current Topics in Solid State Physics
Issue number10-12
StatePublished - Dec 1 2016
Externally publishedYes


  • molybdenum disulfide
  • pulsed laser deposition
  • transition metal dichalcogenides

ASJC Scopus subject areas

  • Condensed Matter Physics


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