Future Challenges and Prospects of Cluster SIMS

Peter Williams, Christine M. Mahoney

Research output: Chapter in Book/Report/Conference proceedingChapter

1 Scopus citations


Cluster secondary ion mass spectrometry (SIMS) has considerable promise for use as a mass spectrometric molecular imaging and depth profiling method. Some future challenges for cluster SIMS are readily identified: extend the molecular mass range accessible to focusable small cluster beams; improve data rates for small clusters by moving away from pulsed primary beams; develop imaging modalities for very large cluster beams; develop understanding of parameters governing molecular ejection and ionization to allow improvements in useful ion yields; and develop understanding of matrix effects to allow for quantitative analysis. Efficiency is a central theme of this chapter; it can best be defined in terms of "useful ion yield," that is, the product of the fraction of target molecules consumed that are sputtered intact, the fraction of intact molecules that are ionized, and the fraction of ions that are transmitted and detected.

Original languageEnglish (US)
Title of host publicationCluster Secondary Ion Mass Spectrometry
Subtitle of host publicationPrinciples and Applications
PublisherJohn Wiley and Sons
Number of pages15
ISBN (Print)9780470886052
StatePublished - Apr 15 2013


  • Biological imaging
  • Cluster secondary ion mass spectrometry (SIMS)
  • Depth profiling method
  • Ionization
  • Matrix effects
  • Molecular ejection
  • Quantitative analysis

ASJC Scopus subject areas

  • General Chemistry


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