Abstract
Plasma-enhanced chemical vapor deposition has been used for the deposition of diamond and diamond-like thin films during the last decade with great success. Here we present experimental evidence that a chemical vapor deposition technique can also be used to synthesize other forms of carbon including fullerenes and hydrocarbon polymers. The mechanism of diamond nucleation and fullerene formation appear closely related.
Original language | English (US) |
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Pages (from-to) | 51-60 |
Number of pages | 10 |
Journal | ACS Symposium Series |
Volume | 681 |
State | Published - Dec 1 1998 |
ASJC Scopus subject areas
- Chemistry(all)
- Chemical Engineering(all)