Fullerenes and Polymers Produced by the Chemical Vapor Deposition Method

Steve Kleckley, Hao Wang, Isaiah Oladeji, Lee Chow, Terry K. Daly, P R Buseck, Touradj Solouki, Alan Marshall

Research output: Contribution to journalArticlepeer-review

5 Scopus citations


Plasma-enhanced chemical vapor deposition has been used for the deposition of diamond and diamond-like thin films during the last decade with great success. Here we present experimental evidence that a chemical vapor deposition technique can also be used to synthesize other forms of carbon including fullerenes and hydrocarbon polymers. The mechanism of diamond nucleation and fullerene formation appear closely related.

Original languageEnglish (US)
Pages (from-to)51-60
Number of pages10
JournalACS Symposium Series
StatePublished - Dec 1 1998

ASJC Scopus subject areas

  • Chemistry(all)
  • Chemical Engineering(all)


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