Plasma-enhanced chemical vapor deposition has been used for the deposition of diamond and diamond-like thin films during the last decade with great success. Here we present experimental evidence that a chemical vapor deposition technique can also be used to synthesize other forms of carbon including fullerenes and hydrocarbon polymers. The mechanism of diamond nucleation and fullerene formation appear closely related.
|Original language||English (US)|
|Number of pages||10|
|Journal||ACS Symposium Series|
|State||Published - Dec 1 1998|
ASJC Scopus subject areas
- Chemical Engineering(all)