Final state effects in VUV and soft X-ray absorption spectra of transition metal oxides and silicate alloys: Comparisons between experiment and ab initio calculations

G. Lucovsky; Y. Zhang; C. C. Fulton; Y. Zou; R. J. Nemanich; H. Ade; J. L. Whitten

doi:10.1016/j.elspec.2005.01.251

Final state effects in VUV and soft X-ray absorption spectra of transition metal oxides and silicate alloys: Comparisons between experiment and ab initio calculations

G. Lucovsky, Y. Zhang, C. C. Fulton, Y. Zou, R. J. Nemanich, H. Ade, J. L. Whitten

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

This paper uses X-ray absorption spectroscopy and vacuum ultra-violet spectroscopic ellipsometry to study the electronic structure of high-k transition metal (TM) oxide gate dielectrics. The results are applicable to TM and rare earth (RE) silicate and aluminate alloys, as well as complex oxides comprised of mixed TM/TM and TM/RE oxides. These studies identify the nature of the lowest conduction band d^* states, which define the optical band gap, including their relationship to the band gap, E_g, of the oxide.

Original language	English (US)
Pages (from-to)	917-919
Number of pages	3
Journal	Journal of Electron Spectroscopy and Related Phenomena
Volume	144-147
DOIs	https://doi.org/10.1016/j.elspec.2005.01.251
State	Published - Jun 2005
Externally published	Yes

Keywords

Intra- and inter-atomic transitions
Spectroscopic ellipsometry
Transition metal oxides
X-ray absorption spectra

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Radiation
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Spectroscopy
Physical and Theoretical Chemistry

Access to Document

10.1016/j.elspec.2005.01.251

Cite this

Lucovsky, G., Zhang, Y., Fulton, C. C., Zou, Y., Nemanich, R. J., Ade, H., & Whitten, J. L. (2005). Final state effects in VUV and soft X-ray absorption spectra of transition metal oxides and silicate alloys: Comparisons between experiment and ab initio calculations. Journal of Electron Spectroscopy and Related Phenomena, 144-147, 917-919. https://doi.org/10.1016/j.elspec.2005.01.251

Final state effects in VUV and soft X-ray absorption spectra of transition metal oxides and silicate alloys: Comparisons between experiment and ab initio calculations. / Lucovsky, G.; Zhang, Y.; Fulton, C. C. et al.
In: Journal of Electron Spectroscopy and Related Phenomena, Vol. 144-147, 06.2005, p. 917-919.

Research output: Contribution to journal › Article › peer-review

Lucovsky, G, Zhang, Y, Fulton, CC, Zou, Y, Nemanich, RJ, Ade, H & Whitten, JL 2005, 'Final state effects in VUV and soft X-ray absorption spectra of transition metal oxides and silicate alloys: Comparisons between experiment and ab initio calculations', Journal of Electron Spectroscopy and Related Phenomena, vol. 144-147, pp. 917-919. https://doi.org/10.1016/j.elspec.2005.01.251

@article{1708e4a0dfe8428f9ad1e5a98ad77dd8,

title = "Final state effects in VUV and soft X-ray absorption spectra of transition metal oxides and silicate alloys: Comparisons between experiment and ab initio calculations",

abstract = "This paper uses X-ray absorption spectroscopy and vacuum ultra-violet spectroscopic ellipsometry to study the electronic structure of high-k transition metal (TM) oxide gate dielectrics. The results are applicable to TM and rare earth (RE) silicate and aluminate alloys, as well as complex oxides comprised of mixed TM/TM and TM/RE oxides. These studies identify the nature of the lowest conduction band d* states, which define the optical band gap, including their relationship to the band gap, Eg, of the oxide.",

keywords = "Intra- and inter-atomic transitions, Spectroscopic ellipsometry, Transition metal oxides, X-ray absorption spectra",

author = "G. Lucovsky and Y. Zhang and Fulton, {C. C.} and Y. Zou and Nemanich, {R. J.} and H. Ade and Whitten, {J. L.}",

note = "Funding Information: This research has been supported by ONR, SRC and the SRC/ISMT Front End Processes Center.",

year = "2005",

month = jun,

doi = "10.1016/j.elspec.2005.01.251",

language = "English (US)",

volume = "144-147",

pages = "917--919",

journal = "Journal of Electron Spectroscopy and Related Phenomena",

issn = "0368-2048",

publisher = "Elsevier",

}

TY - JOUR

T1 - Final state effects in VUV and soft X-ray absorption spectra of transition metal oxides and silicate alloys

T2 - Comparisons between experiment and ab initio calculations

AU - Lucovsky, G.

AU - Zhang, Y.

AU - Fulton, C. C.

AU - Zou, Y.

AU - Nemanich, R. J.

AU - Ade, H.

AU - Whitten, J. L.

N1 - Funding Information: This research has been supported by ONR, SRC and the SRC/ISMT Front End Processes Center.

PY - 2005/6

Y1 - 2005/6

N2 - This paper uses X-ray absorption spectroscopy and vacuum ultra-violet spectroscopic ellipsometry to study the electronic structure of high-k transition metal (TM) oxide gate dielectrics. The results are applicable to TM and rare earth (RE) silicate and aluminate alloys, as well as complex oxides comprised of mixed TM/TM and TM/RE oxides. These studies identify the nature of the lowest conduction band d* states, which define the optical band gap, including their relationship to the band gap, Eg, of the oxide.

AB - This paper uses X-ray absorption spectroscopy and vacuum ultra-violet spectroscopic ellipsometry to study the electronic structure of high-k transition metal (TM) oxide gate dielectrics. The results are applicable to TM and rare earth (RE) silicate and aluminate alloys, as well as complex oxides comprised of mixed TM/TM and TM/RE oxides. These studies identify the nature of the lowest conduction band d* states, which define the optical band gap, including their relationship to the band gap, Eg, of the oxide.

KW - Intra- and inter-atomic transitions

KW - Spectroscopic ellipsometry

KW - Transition metal oxides

KW - X-ray absorption spectra

UR - http://www.scopus.com/inward/record.url?scp=17444372768&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=17444372768&partnerID=8YFLogxK

U2 - 10.1016/j.elspec.2005.01.251

DO - 10.1016/j.elspec.2005.01.251

M3 - Article

AN - SCOPUS:17444372768

SN - 0368-2048

VL - 144-147

SP - 917

EP - 919

JO - Journal of Electron Spectroscopy and Related Phenomena

JF - Journal of Electron Spectroscopy and Related Phenomena

ER -

Final state effects in VUV and soft X-ray absorption spectra of transition metal oxides and silicate alloys: Comparisons between experiment and ab initio calculations

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this