@inproceedings{bc63746ef0b648a8b0a446549526c707,
title = "Film Bulk Acoustic-wave Resonator (FBAR) based infrared sensor",
abstract = "This paper described an infrared (IR) radiation sensor based on Film Bulk Acoustic-wave Resonator (FBAR). The resonant frequency of FBAR sensor downshifts linearly when there is IR (peak wavelength at 780nm) illumination on the device. This effect attributed to the temperature sensitivity of the FBAR. The noise equivalent temperature difference (NETD) and the detection limit for 780 nm IR of the sensor is 25 mK at 25 °C and 19 μW/mm2, respectively. This study has proven the feasibility of detection of IR using ZnO film based FBAR.",
keywords = "Film bulk acoustic-wave resonator, Frequency shift, Infrared radiation",
author = "Ziyu Wang and Xiaotun Qiu and Jon Oiler and Jie Zhu and Hongyu Yu",
year = "2010",
month = nov,
day = "29",
doi = "10.1109/NEMS.2010.5592244",
language = "English (US)",
isbn = "9781424465439",
series = "2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010",
pages = "824--827",
booktitle = "2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010",
note = "5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 ; Conference date: 20-01-2010 Through 23-01-2010",
}