Fabrication of freestanding 1-D PDMS microstructures using capillary micromolding

Jagannathan Rajagopalan; M. Taher A Saif

doi:10.1109/JMEMS.2013.2262605

Fabrication of freestanding 1-D PDMS microstructures using capillary micromolding

Jagannathan Rajagopalan, M. Taher A Saif

Research output: Contribution to journal › Article › peer-review

20 Scopus citations

Abstract

A method to create freestanding, biocompatible polydimethylsiloxane (PDMS) microstructures is presented. First, capillary flow through micro channels on silicon (Si) substrates is used to create high fidelity PDMS structures that are a few μm wide and deep but several mm long (length to width/depth ~ 500:1. Next, an improvised procedure is employed to remove the cured PDMS microstructures from the Si substrate without damaging them. The method is used to create extremely sensitive cantilever beams with stiffness less than 0.1 pN/μm, and micro platforms for cell biology studies. The PDMS microstructures created using this method have applications in cell mechanobiology as force and mass sensors.

Original language	English (US)
Article number	6541951
Pages (from-to)	992-994
Number of pages	3
Journal	Journal of Microelectromechanical Systems
Volume	22
Issue number	5
DOIs	https://doi.org/10.1109/JMEMS.2013.2262605
State	Published - 2013

Keywords

BioMEMS
Cell mechanics
Force sensors

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/JMEMS.2013.2262605

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title = "Fabrication of freestanding 1-D PDMS microstructures using capillary micromolding",

abstract = "A method to create freestanding, biocompatible polydimethylsiloxane (PDMS) microstructures is presented. First, capillary flow through micro channels on silicon (Si) substrates is used to create high fidelity PDMS structures that are a few μm wide and deep but several mm long (length to width/depth ~ 500:1. Next, an improvised procedure is employed to remove the cured PDMS microstructures from the Si substrate without damaging them. The method is used to create extremely sensitive cantilever beams with stiffness less than 0.1 pN/μm, and micro platforms for cell biology studies. The PDMS microstructures created using this method have applications in cell mechanobiology as force and mass sensors.",

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doi = "10.1109/JMEMS.2013.2262605",

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T1 - Fabrication of freestanding 1-D PDMS microstructures using capillary micromolding

AU - Rajagopalan, Jagannathan

AU - Saif, M. Taher A

PY - 2013

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N2 - A method to create freestanding, biocompatible polydimethylsiloxane (PDMS) microstructures is presented. First, capillary flow through micro channels on silicon (Si) substrates is used to create high fidelity PDMS structures that are a few μm wide and deep but several mm long (length to width/depth ~ 500:1. Next, an improvised procedure is employed to remove the cured PDMS microstructures from the Si substrate without damaging them. The method is used to create extremely sensitive cantilever beams with stiffness less than 0.1 pN/μm, and micro platforms for cell biology studies. The PDMS microstructures created using this method have applications in cell mechanobiology as force and mass sensors.

AB - A method to create freestanding, biocompatible polydimethylsiloxane (PDMS) microstructures is presented. First, capillary flow through micro channels on silicon (Si) substrates is used to create high fidelity PDMS structures that are a few μm wide and deep but several mm long (length to width/depth ~ 500:1. Next, an improvised procedure is employed to remove the cured PDMS microstructures from the Si substrate without damaging them. The method is used to create extremely sensitive cantilever beams with stiffness less than 0.1 pN/μm, and micro platforms for cell biology studies. The PDMS microstructures created using this method have applications in cell mechanobiology as force and mass sensors.

KW - BioMEMS

KW - Cell mechanics

KW - Force sensors

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M3 - Article

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ER -

Fabrication of freestanding 1-D PDMS microstructures using capillary micromolding

Abstract

Keywords

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