Abstract
We describe a technique for efficient, quantitative, standardless elemental mapping using a high‐angle annular detector in a scanning transmission electron microscope (STEM) to collect elastically scattered electrons. With a single crystal specimen, contrast due to thickness variations, diffraction, and channelling effects can be avoided, so that the resulting image contrast quantitatively reflects variations in impurity concentration. We compare a number of simple analytical approximations to the elastic scattering cross sections and show that a standardless analysis is possible over a wide range of atomic number and inner detector angle to an absolute accuracy of better than 20%. 1986 Blackwell Science Ltd
Original language | English (US) |
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Pages (from-to) | 229-249 |
Number of pages | 21 |
Journal | Journal of Microscopy |
Volume | 144 |
Issue number | 3 |
DOIs | |
State | Published - Dec 1986 |
Externally published | Yes |
Keywords
- STEM
- Z‐contrast
- analytical electron microscopy
- annular detector
- elastic scattering
- elemental mapping
ASJC Scopus subject areas
- Pathology and Forensic Medicine
- Histology