Electron ionization cross sections for atomic subshells

Peter Rez

Research output: Contribution to journalArticlepeer-review

9 Scopus citations


Ionization of atoms is the first step in many analytical procedures. The cross section for ionizing a particular atomic shell is essential for calculating the magnitude of analytical signals. Calculations using atomic wave functions for various shells of all elements relevant for X-ray microanalysis over a range of electron energies up to 400 keV were performed. The calculations for high energies above threshold can be considerably simplified by using the mathematical form of the Bethe ridge that dominates the scattering in this region. Corrections for exchange at low energies above threshold are incorporated in these calculations. A selection of results showing the effects of different approximations on ionization cross sections for K, L, and M shells is presented.

Original languageEnglish (US)
Pages (from-to)42-53
Number of pages12
JournalMicroscopy and Microanalysis
Issue number1
StatePublished - Feb 1 2003


  • Analytical electron microscopy
  • Cross sections
  • Electron ionization

ASJC Scopus subject areas

  • Instrumentation


Dive into the research topics of 'Electron ionization cross sections for atomic subshells'. Together they form a unique fingerprint.

Cite this