Electron-impact dissociation cross sections for CHF3 and C 3F8

J. E. Baio; H. Yu; D. W. Flaherty; H. F. Winters; D. B. Graves

doi:10.1088/0022-3727/40/22/017

Electron-impact dissociation cross sections for CHF₃ and C ₃F₈

J. E. Baio, H. Yu, D. W. Flaherty, H. F. Winters, D. B. Graves

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

Absolute total dissociation cross sections, σ_t,diss, by electron-impact are reported for CHF₃ and C₃F₈ from 10 to 300 eV using the chemical gettering technique described by Winters and Inokuti (1982 Phys. Rev. A 25 1420). Data are concentrated in the near-threshold region (10-30 eV). The thresholds for dissociation of CHF ₃ and C₃F₈ are determined to be 10.4 eV and 11.9 eV, respectively. Ionization thresholds occur at 16 eV for CHF₃ and 16.2 eV for C₃F₈. Neutral dissociation cross sections of both CHF₃ and C₃F₈ are obtained by subtracting the ionization cross sections, σ_t,ion, from the total dissociation cross sections, σ_t,diss.

Original language	English (US)
Pages (from-to)	6969-6974
Number of pages	6
Journal	Journal of Physics D: Applied Physics
Volume	40
Issue number	22
DOIs	https://doi.org/10.1088/0022-3727/40/22/017
State	Published - Nov 21 2007
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Acoustics and Ultrasonics
Surfaces, Coatings and Films

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10.1088/0022-3727/40/22/017

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title = "Electron-impact dissociation cross sections for CHF3 and C 3F8",

abstract = "Absolute total dissociation cross sections, σt,diss, by electron-impact are reported for CHF3 and C3F8 from 10 to 300 eV using the chemical gettering technique described by Winters and Inokuti (1982 Phys. Rev. A 25 1420). Data are concentrated in the near-threshold region (10-30 eV). The thresholds for dissociation of CHF 3 and C3F8 are determined to be 10.4 eV and 11.9 eV, respectively. Ionization thresholds occur at 16 eV for CHF3 and 16.2 eV for C3F8. Neutral dissociation cross sections of both CHF3 and C3F8 are obtained by subtracting the ionization cross sections, σt,ion, from the total dissociation cross sections, σt,diss.",

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T1 - Electron-impact dissociation cross sections for CHF3 and C 3F8

AU - Baio, J. E.

AU - Yu, H.

AU - Flaherty, D. W.

AU - Winters, H. F.

AU - Graves, D. B.

PY - 2007/11/21

Y1 - 2007/11/21

N2 - Absolute total dissociation cross sections, σt,diss, by electron-impact are reported for CHF3 and C3F8 from 10 to 300 eV using the chemical gettering technique described by Winters and Inokuti (1982 Phys. Rev. A 25 1420). Data are concentrated in the near-threshold region (10-30 eV). The thresholds for dissociation of CHF 3 and C3F8 are determined to be 10.4 eV and 11.9 eV, respectively. Ionization thresholds occur at 16 eV for CHF3 and 16.2 eV for C3F8. Neutral dissociation cross sections of both CHF3 and C3F8 are obtained by subtracting the ionization cross sections, σt,ion, from the total dissociation cross sections, σt,diss.

AB - Absolute total dissociation cross sections, σt,diss, by electron-impact are reported for CHF3 and C3F8 from 10 to 300 eV using the chemical gettering technique described by Winters and Inokuti (1982 Phys. Rev. A 25 1420). Data are concentrated in the near-threshold region (10-30 eV). The thresholds for dissociation of CHF 3 and C3F8 are determined to be 10.4 eV and 11.9 eV, respectively. Ionization thresholds occur at 16 eV for CHF3 and 16.2 eV for C3F8. Neutral dissociation cross sections of both CHF3 and C3F8 are obtained by subtracting the ionization cross sections, σt,ion, from the total dissociation cross sections, σt,diss.

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Electron-impact dissociation cross sections for CHF₃ and C ₃F₈

Abstract

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