Abstract
This paper describes an electrically tunable and switchable film bulk acoustic resonator (FBAR) that is formed by integrating FBAR with an electrostatic MEMS actuator. Around ∼0.8% tuning of the series resonant frequency (Δf ≅18MHz) at 2.3 GHz is experimentally obtained with an electrostatic actuation voltage varying between 12.2 and 27.5V. Also, switchable resonator with Q (quality) factor of greater than 100 at 2.2 and 4.0 GHz is experimentally demonstrated in a compact device area.
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings of the IEEE International Frequency Control Symposium and Exposition |
| Editors | M.P. Yuhas |
| Pages | 22-26 |
| Number of pages | 5 |
| State | Published - 2005 |
| Externally published | Yes |
| Event | 2004 IEEE International Frequency Control Symposium and Exposition. A Conference of the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society (UFFC-S) - Montreal, Canada Duration: Aug 23 2004 → Aug 27 2004 |
Other
| Other | 2004 IEEE International Frequency Control Symposium and Exposition. A Conference of the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society (UFFC-S) |
|---|---|
| Country/Territory | Canada |
| City | Montreal |
| Period | 8/23/04 → 8/27/04 |
Keywords
- Electrical tuning
- FBAR
- Mems actuator
- Switchable resonator
ASJC Scopus subject areas
- Engineering(all)