Effects of boron doping on the surface morphology and structural imperfections of diamond films

X. H. Wang, G. H.M. Ma, Wei Zhu, J. T. Glass, L. Bergman, K. F. Turner, R. J. Nemanich

Research output: Contribution to journalArticlepeer-review

51 Scopus citations


This paper reports the surface morphology and structural imperfection of boron-doped diamond films prepared by microwave plasma enhanced chemical vapor deposition. It was found that boron dopants improved the structural quality of diamond films. The surface morphology consisted mainly of the {111} facets. A significant enhancement of nucleation density and consequent decrease of grain size was observed with the addition of diborane in the gas phase. Raman spectroscopy indicated that, with the introduction of boron dopants, the integrated intensity of the diamond peak at 1332 cm-1 increased relative to the intensity of the non-diamond peak at about 1500 cm-1, and the full-width at half maximum of the 1332 cm-1 peak decreased. In addition, the 1.681 eV (738 nm) photoluminescence peak related to point defects was effectively reduced, or even eliminated by the boron dopants. Finally, transmission electron microscopy studies found that the densities of planar defects (mainly stacking faults and microtwins) also decreased with the boron addition.

Original languageEnglish (US)
Pages (from-to)828-835
Number of pages8
JournalDiamond and Related Materials
Issue number7
StatePublished - May 1 1992
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanical Engineering
  • Physics and Astronomy(all)
  • Materials Chemistry
  • Chemistry(all)
  • Electrical and Electronic Engineering


Dive into the research topics of 'Effects of boron doping on the surface morphology and structural imperfections of diamond films'. Together they form a unique fingerprint.

Cite this