Direct electrochemical imprinting of sinusoidal linear gratings into silicon

Engineering & Materials Science

• Etching 100%
• Silicon 73%
• Wet etching 38%
• Metals 29%
• Catalysts 23%
• Substrates 19%
• Holographic gratings 18%
• Thin films 17%
• Ions 17%
• Semiconductor materials 16%
• Microoptics 14%
• Diffraction gratings 14%
• Electron beam lithography 14%
• Silicon photonics 13%
• Optical devices 11%
• Micromachining 11%
• Silicon wafers 11%
• Temperature 11%
• Point contacts 10%
• Photonics 10%
• Spatial distribution 10%
• Brittleness 10%
• Lithography 10%
• Melting point 9%
• Mirrors 9%
• Lenses 9%
• Aspect ratio 8%
• Plasmas 8%
• Wavelength 8%
• Demonstrations 7%
• Degradation 6%
• Throughput 6%
• Defects 6%
• Geometry 5%
• Costs 3%