Abstract
An introductory presentation is made on the applications of secondary ion mass spectrometry to diffusion analysis in solids. The emphasis of discussion is to present an overview of the operational principles of SIMS and the types of diffusion experiments that can be analyzed as assessed from current practice. This includes a review of problems related to quantitation and standardization of composition and distance.
| Original language | English (US) |
|---|---|
| Title of host publication | Unknown Host Publication Title |
| Editors | G.E. Murch, H.K. Birnbaum, J.R. Cost |
| Place of Publication | Warrendale, PA, USA |
| Publisher | Metallurgical Soc of AIME |
| Pages | 179-202 |
| Number of pages | 24 |
| State | Published - 1984 |
ASJC Scopus subject areas
- Engineering(all)