Design and fabrication of unsteady electrokinetic microactuator arrays for turbulent boundary layer control

Francisco J. Diez; Werner J.A. Dahm

doi:10.1088/0960-1317/14/10/004

Design and fabrication of unsteady electrokinetic microactuator arrays for turbulent boundary layer control

Francisco J. Diez, Werner J.A. Dahm

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

A micro-electro-kinetic actuator (MEKA) array for the control of the viscous sublayer of a turbulent boundary layer is developed. Several generations of MEKA arrays are fabricated that explore the use of non-conventional MEMS materials such as quartz, polymers or mylar and are combined where needed with conventional MEMS design and fabrication process. The potential advantages of using the electrokinetic principle as the basis for a new class of microscale actuators suitable for active sublayer control are also discussed. It is found that the actuators have no moving parts and they achieve the flow rates required for this type of flow control.

Original language	English (US)
Pages (from-to)	1307-1320
Number of pages	14
Journal	Journal of Micromechanics and Microengineering
Volume	14
Issue number	10
DOIs	https://doi.org/10.1088/0960-1317/14/10/004
State	Published - Oct 2004
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/0960-1317/14/10/004

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Design and fabrication of unsteady electrokinetic microactuator arrays for turbulent boundary layer control

Abstract

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