Demonstration of low loss β -Ga2O3 optical waveguides in the UV-NIR spectra

Jingan Zhou, Hong Chen, Houqiang Fu, Kai Fu, Xuguang Deng, Xuanqi Huang, Tsung Han Yang, Jossue A. Montes, Chen Yang, Xin Qi, Baoshun Zhang, Xiaodong Zhang, Yuji Zhao

Research output: Contribution to journalArticlepeer-review

12 Scopus citations


In this paper, we report the fabrication of low loss beta-phase gallium oxide (β-Ga2O3) optical waveguides and the propagation loss analysis of the waveguides in the ultraviolet (UV) to near infrared (NIR) spectral region. The β-Ga2O3 thin films were grown on sapphire substrates using metal organic chemical vapor deposition and were fabricated into various waveguide structures using nanofabrication processes. A low propagation loss of 3.7 dB/cm was obtained on the β-Ga2O3 waveguide at the wavelength of 810 nm, which is comparable to the state of the art. Combined with theoretical simulations, various loss mechanisms from two-photon absorption, sidewall scattering, top surface scattering, and bulk scattering were discussed for β-Ga2O3 waveguides, and their contributions to the total optical loss were estimated. These results show that β-Ga2O3 is a promising optical material for the fabrication of various integrated photonic devices in the UV-NIR spectra region.

Original languageEnglish (US)
Article number251108
JournalApplied Physics Letters
Issue number25
StatePublished - Dec 16 2019

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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