Abstract
This letter presents results of rapid processing for X-ray absorption correction in quantitative X-ray microanalysis using an analytical electron microscope. A computer-based system developed for analytical electron microscopy is used to assist in the extrapolation method, which does not require thickness measurement but only the recording of characteristic X-rays for absorption correction.
Original language | English (US) |
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Pages (from-to) | 263-265 |
Number of pages | 3 |
Journal | Ultramicroscopy |
Volume | 45 |
Issue number | 2 |
DOIs | |
State | Published - Sep 1992 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Instrumentation