Chemical aspects of Pb-Zr-Ti oxide thin film syntheses by pe-mocvd below 500-c

William Petuskey, David A. Richardson, Sandwip Dey

Research output: Contribution to journalArticlepeer-review

9 Scopus citations


The general features of the chemistry in synthesizing lead zirconium titanate thin films by PE-MOCVD are discussed based on a preliminary experimental investigation. A qualitative model was constructed as a guide for optimizing the formation of the perovskite phase in the as-deposited condition. This was based on concepts of crystal chemistry of the perovskite and pyrochlore structures and the observed deposition kinetics. Currently, thin films containing up to 92 vol % perovskite have been formed below 500-C in the as-deposited condition. Sufficient latitude remains in adjusting the operating parameters that the formation of phase pure perovskite is considered possible. A thermodynamic analysis of the solid state suggests that low temperature thermal equilibration will yield minority lead-rich phases. Consequently, nonequilibrium processing techniques such as plasma processing are considered necessary. Ferroelectric hysteresis was observed for films receiving post deposition anneals.

Original languageEnglish (US)
Pages (from-to)269-295
Number of pages27
JournalIntegrated Ferroelectrics
Issue number1-4
StatePublished - Nov 1992

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry


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