Characterization ofWC/B4C multilayers sputtered in argoWmethane atmospheres

Patrick E. Diehl, Mark W. Lund, David W. Madsenx, Larry C. McIntyre, David J. Smith

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations


A series of six WC,JB4C multilayers was produced by d.c. magnetron sputtering in an atmosphere of argon with methane additions (from 0 to 15%). The microstructure and chemistry of these multilayers was studied using Transmission/High Resolution Electron Microscopy, X-ray Diffraction, X-ray Photoelectron Spectroscopy, Electron Probe Microanalysis and Ion Beam Analysis with MeV helium beams. The multilayers were shown to be completely amorphous. In addition to carbon incorporation, a significant amount of hydrogen was incorporated. The amounts of hydrogen and carbon present increased with the percentage of methane (up to the 12% sample), but the atom percent of argon in the multilayers was constant, regardless of the methane concentration. It was found that reflecövity values for Mg K-A radiation improved as the methane concentration increased, with the sample produced in a 12% methane atmosphere showing the highest reflectivity. Annealing of a representative sample caused a significant loss of hydrogen, and a decrease of the bilayer spacing.

Original languageEnglish (US)
Pages (from-to)354-364
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - Jan 21 1993
EventMultilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography 1992 - San Diego, United States
Duration: Jul 22 1992 → …

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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