Characterization of GaN epitaxial films grown on SiN x and TiN x porous network templates

J. Xie, Y. Fu, Ü Özgür, Y. T. Moon, F. Yun, H. Morkoç, H. O. Everitt, A. Sagar, R. M. Feenstra, C. K. Inoki, T. S. Kuan, L. Zhou, David Smith

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations


We report on the structural, electrical, and optical characterization of GaN epitaxial layers grown by metalorganic chemical vapor deposition (MOCVD) on SiN x and TiN x, porous templates in order to reduce the density of extended defects. Observations by transmission electron microscopy (TEM) indicate an order of magnitude reduction in the dislocation density in GaN layers grown on TiN x and SiN x networks (down to ∼10 8 cm -2) compared with the control GaN layers. Both SiN x and TiN x porous network structures are found to be effective in blocking the threading dislocation from penetrating into the upper layer. Supporting these findings are the results from X-Ray diffraction and low temperature photoluminescence (PL) measurements. The linewidth of the asymmetric X-Ray diffraction (XRD) (1012) peak decreases considerably for the layers grown with the use of SiN x and TiN x layers, which generally suggests the reduction of edge and mixed threading dislocations. In general, further improvement is observed with the addition of a second SiN x layer. The room temperature decay times obtained from biexponential fits to time-resolved photoluminescence (TRPL) data are increased with the inclusion of SiN x and TiN x layers. TRPL results suggest that primarily point-defect and impurity-related nonradiative centers are responsible for reducing the lifetime. The carrier lifetime of 1.86 ns measured for a TiN x network sample is slightly longer than that for a 200 μm-thick high quality freestanding GaN. Results on samples grown by a new technique called crack-assisted lateral overgrowth, which combines in situ deposition of SiN x mask and conventional lateral overgrowth, are also reported.

Original languageEnglish (US)
Title of host publicationGallium Nitride Materials and Devices
StatePublished - 2006
EventGallium Nitride Materials and Devices - San Jose, CA, United States
Duration: Jan 23 2006Jan 25 2006

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherGallium Nitride Materials and Devices
Country/TerritoryUnited States
CitySan Jose, CA


  • Dislocation
  • GaN
  • Porous Network
  • SEM
  • SiN
  • TEM
  • TPRL
  • TiN
  • XRD

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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