Changes in the medium range order of α-Si: H thin films observed by variable coherence TEM

J. M. Gibson, Michael Treacy, P. M. Voyles, J. R. Abelson, H. C. Jin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations


We have investigated the structure of α-Si:H thin films using variable coherence transmission electron microscopy. Variable coherence is a new microscopy technique that is sensitive to higher-order atomic position correlations. We observe changes in the structure of α-Si:H with increasing hydrogen content and with light soaking. Based on these observations we conclude that a less ordered form of α-Si:H is more structurally stable than a more ordered form. This may have implications for understanding the Staebler-Wronski effect.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium - Proceedings
EditorsR. Schropp, H.M. Branz, M. Hack, I. Shimizu, S. Wagner
Number of pages6
StatePublished - 1999
Externally publishedYes
EventProceedings of the 1998 MRS Spring Meeting - San Francisco, CA, USA
Duration: Apr 14 1998Apr 17 1998


OtherProceedings of the 1998 MRS Spring Meeting
CitySan Francisco, CA, USA

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials


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