TY - GEN
T1 - Building a Digital Twin of the Photolithography Area of A Real-World Wafer FAB To Validate Improved Production Control
AU - Deenen, Patrick C.
AU - Adriaensen, Rick A.M.
AU - Fowler, John W.
N1 - Publisher Copyright:
© 2022 IEEE.
PY - 2022
Y1 - 2022
N2 - Since the photolithography area is generally the bottleneck of a wafer fab, effective scheduling in this area can increase the performance of the complete fab significantly. However, the potential benefit of proposed solution methods is often validated in a static and deterministic scheduling setting, while the manufacturing environment is dynamic and stochastic. In this paper, we build a discrete-event simulation model based on real-world data of the photolithography area, which can be used to accurately determine the performance of new scheduling solutions. A case study at a global semiconductor manufacturer is presented. The simulation model, a so-called digital twin, captures the vast majority of the stochastic behavior such as the arrival of jobs, processing times, setup times and machine downs. In addition, a dispatching heuristic is developed to replicate the current practice of production control. Both the simulation model and the dispatching heuristic are validated and shown to be accurate.
AB - Since the photolithography area is generally the bottleneck of a wafer fab, effective scheduling in this area can increase the performance of the complete fab significantly. However, the potential benefit of proposed solution methods is often validated in a static and deterministic scheduling setting, while the manufacturing environment is dynamic and stochastic. In this paper, we build a discrete-event simulation model based on real-world data of the photolithography area, which can be used to accurately determine the performance of new scheduling solutions. A case study at a global semiconductor manufacturer is presented. The simulation model, a so-called digital twin, captures the vast majority of the stochastic behavior such as the arrival of jobs, processing times, setup times and machine downs. In addition, a dispatching heuristic is developed to replicate the current practice of production control. Both the simulation model and the dispatching heuristic are validated and shown to be accurate.
UR - http://www.scopus.com/inward/record.url?scp=85147424927&partnerID=8YFLogxK
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U2 - 10.1109/WSC57314.2022.10015307
DO - 10.1109/WSC57314.2022.10015307
M3 - Conference contribution
AN - SCOPUS:85147424927
T3 - Proceedings - Winter Simulation Conference
SP - 3394
EP - 3405
BT - Proceedings of the 2022 Winter Simulation Conference, WSC 2022
A2 - Feng, B.
A2 - Pedrielli, G.
A2 - Peng, Y.
A2 - Shashaani, S.
A2 - Song, E.
A2 - Corlu, C.G.
A2 - Lee, L.H.
A2 - Chew, E.P.
A2 - Roeder, T.
A2 - Lendermann, P.
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2022 Winter Simulation Conference, WSC 2022
Y2 - 11 December 2022 through 14 December 2022
ER -