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Atomic layer deposition of crystalline SrHfO3 directly on Ge (001) for high-k dielectric applications
Martin D. McDaniel, Chengqing Hu, Sirong Lu, Thong Q. Ngo, Agham Posadas, Aiting Jiang, David Smith, Edward T. Yu, Alexander A. Demkov, John G. Ekerdt
Research output: Contribution to journal › Article › peer-review
47
Scopus
citations