Analysis of the composite structures in diamond thin films by Raman spectroscopy

R. E. Shroder, R. J. Nemanich, J. T. Glass

Research output: Contribution to journalArticlepeer-review

553 Scopus citations


Diamond and diamondlike thin films produced by various chemical-vapor- deposition processes have been examined using Raman spectroscopy. These films exhibit features in the Raman spectra, suggesting that they are composites of crystalline and amorphous diamond and graphitic structures. The components of this composite structure that contribute to the Raman scattering are discussed in terms of sp2- and sp3-bonded structures. The use of Raman spectroscopy as a technique for estimating the sp2-to-sp3 bonding ratio is considered. Powder composites of BN-diamond and graphite-diamond have been studied as a means of modeling the films, and a simple theoretical model of the Raman scattering from these samples is proposed. From these results it is shown that it is necessary to make assumptions about the domain size of the graphitic sp2 regions. It is found that the Raman scattering associated with sp2 bonding in the films is much stronger than that from single-crystalline or microcrystalline graphite structures. Shifts of the vibrational modes are also observed. The optical and vibrational properties of the sp2 component in the films implies a different atomic microstructure. A model of the sp2-bonding configurations in the films is proposed which may account for the observed features in the Raman spectra.

Original languageEnglish (US)
Pages (from-to)3738-3745
Number of pages8
JournalPhysical Review B
Issue number6
StatePublished - 1990
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics


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