TY - GEN
T1 - Acetone sensor based on film bulk acoustic resonator
AU - Qiu, Xiaotun
AU - Tang, Rui
AU - Zhu, Jie
AU - Yu, Hongyu
AU - Oiler, Jon
AU - Wang, Ziyu
PY - 2010/12/1
Y1 - 2010/12/1
N2 - This paper described acetone sensing using ZnO based Film Bulk Acoustic Resonator (FBAR). The resonant frequency of the FBAR increased as the concentration of acetone increased. The detection limit of acetone was around 4 ppm. The density decrease of the ZnO induced by releasing carbon dioxide generated from the reaction between acetone and the adsorbed oxygen ions on the ZnO surface was assumed to be responsible for the frequency upshift. Upon exposure to ethanol (a major environmental crosstalk for traditional acetone sensors), an opposite response (decrease of resonant frequency) was observed. Water was generated and absorbed on the ZnO surface during the ethanol sensing process. Thus, the density of the ZnO film increased, resulting in a frequency drop. FBAR sensor possessed the unique ability to distinguish acetone from ethanol due to their different reaction behaviors.
AB - This paper described acetone sensing using ZnO based Film Bulk Acoustic Resonator (FBAR). The resonant frequency of the FBAR increased as the concentration of acetone increased. The detection limit of acetone was around 4 ppm. The density decrease of the ZnO induced by releasing carbon dioxide generated from the reaction between acetone and the adsorbed oxygen ions on the ZnO surface was assumed to be responsible for the frequency upshift. Upon exposure to ethanol (a major environmental crosstalk for traditional acetone sensors), an opposite response (decrease of resonant frequency) was observed. Water was generated and absorbed on the ZnO surface during the ethanol sensing process. Thus, the density of the ZnO film increased, resulting in a frequency drop. FBAR sensor possessed the unique ability to distinguish acetone from ethanol due to their different reaction behaviors.
UR - http://www.scopus.com/inward/record.url?scp=79951913294&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=79951913294&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2010.5690310
DO - 10.1109/ICSENS.2010.5690310
M3 - Conference contribution
AN - SCOPUS:79951913294
SN - 9781424481682
T3 - Proceedings of IEEE Sensors
SP - 1546
EP - 1549
BT - IEEE Sensors 2010 Conference, SENSORS 2010
T2 - 9th IEEE Sensors Conference 2010, SENSORS 2010
Y2 - 1 November 2010 through 4 November 2010
ER -