Abstract
In this paper, a scheduling approach that combines multiple dispatching criteria into a single rule, with the objective of simultaneously optimizing multiple performance measures is proposed. This is accomplished using a linear combination with relative weights. The weights identify the contribution of the different criteria. The weights' assignments to the different criteria are optimized using a mixture design of experiments (DOE) and multiple response optimization. Results using the new approach show significant improvement versus the use of a single dispatching criterion.
Original language | English (US) |
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Pages (from-to) | 501-510 |
Number of pages | 10 |
Journal | IEEE Transactions on Semiconductor Manufacturing |
Volume | 16 |
Issue number | 3 |
DOIs | |
State | Published - Aug 2003 |
Keywords
- Dispatching
- Scheduling
- Semiconductor manufacturing
- Wafer fabrication
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Industrial and Manufacturing Engineering
- Electrical and Electronic Engineering