A multi-step electromechanical ΣΔ converter for micro-g capacitive accelerometers

Haluk Kulah, Junseok Chae, Navid Yazdi, Khalil Najafi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

33 Scopus citations


A multi-step electromechanical ΣΔ modulator for μg accelerometers is described. A two-element sensor array is used in two ΣΔ loops and resolution improves by >2x compared to a conventional 2nd-order ΣΔ modulator. This CMOS chip operates at 1MHz and provides 0.2-1.2V/pF sensitivity, <20aF resolution, >120dB dynamic range, and dissipates <12mW.

Original languageEnglish (US)
Title of host publicationDigest of Technical Papers - IEEE International Solid-State Circuits Conference
EditorsL.C. Fujino, A. Grabel, D. Jeager, K.C. Smith
StatePublished - 2003
Externally publishedYes
Event2003 Digest of Technical Papers - , United States
Duration: Feb 9 2003Feb 13 2003


Other2003 Digest of Technical Papers
Country/TerritoryUnited States

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Hardware and Architecture


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