Abstract
We present an in-situ non-volatile tuning method for adjusting MEMS microphone sensitivity using integrated nano-electrodeposits to achieve high directionality in hearing aids. Using a DC bias at room temperature, nano-electrodeposits are electrochemically formed on a Ag-Ge-Se solid electrolyte film integrated with a microphone diaphragm. The in-situ growth mechanism generates mass/stress redistribution on the diaphragm, tuning microphone sensitivity to incoming acoustic sources. Acoustic measurements demonstrate the technique can achieve a tuning range of 1.67 dB (24%), corresponding to a 1.1 7-dB Directivity Index (DI) improvement, which is sufficient to enable acoustic directionality in high accuracy microphone arrays.
Original language | English (US) |
---|---|
Title of host publication | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
Pages | 96-99 |
Number of pages | 4 |
DOIs | |
State | Published - 2009 |
Event | 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: Jan 25 2009 → Jan 29 2009 |
Other
Other | 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 |
---|---|
Country/Territory | Italy |
City | Sorrento |
Period | 1/25/09 → 1/29/09 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering
- Condensed Matter Physics
- Electronic, Optical and Magnetic Materials