Low temperature synthesis of single crystal-like NiAl thin films for barrier- and liner-free interconnects

Physics & Astronomy

1. linings 100%
2. seeds 70%
3. synthesis 66%
4. single crystals 56%
5. thin films 47%
6. crystals 37%
7. sputtering 23%
8. nucleation 22%
9. research projects 18%
10. annealing 18%
11. specifications 14%
12. crystallization 11%
13. wafers 11%
14. temperature 9%
15. performance 6%