TY - GEN
T1 - Ultrasonic electrostatic actuators on a flexible substrate
AU - Kim, Sangpyeong
AU - Zhang, Xu
AU - Daugherty, Robin
AU - Lee, Ed
AU - Kunnen, George
AU - Allee, David
AU - Forsythe, Eric
AU - Chae, Junseok
PY - 2012/5/7
Y1 - 2012/5/7
N2 - We present a MEMS-based electrostatic actuator on a flexible substrate, made of Polyethylene Naphthalate (PEN), which emits acoustic waves at ultrasonic frequencies, aiming for an ultrasound microdevice for equipment inspection. The actuator has a suspended diaphragm, made of parylene, of 2-6 mm diameter and a 6 μm gap between the diaphragm and substrate. A single actuator emits ultrasonic waves at 25 kHz, and pressure of 27 dB SPL (sound pressure level) and a 1 x 2 array emits up to 34.6 dB SPL at 1 cm distance.
AB - We present a MEMS-based electrostatic actuator on a flexible substrate, made of Polyethylene Naphthalate (PEN), which emits acoustic waves at ultrasonic frequencies, aiming for an ultrasound microdevice for equipment inspection. The actuator has a suspended diaphragm, made of parylene, of 2-6 mm diameter and a 6 μm gap between the diaphragm and substrate. A single actuator emits ultrasonic waves at 25 kHz, and pressure of 27 dB SPL (sound pressure level) and a 1 x 2 array emits up to 34.6 dB SPL at 1 cm distance.
UR - http://www.scopus.com/inward/record.url?scp=84860486182&partnerID=8YFLogxK
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U2 - 10.1109/MEMSYS.2012.6170377
DO - 10.1109/MEMSYS.2012.6170377
M3 - Conference contribution
AN - SCOPUS:84860486182
SN - 9781467303248
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 1193
EP - 1196
BT - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
T2 - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Y2 - 29 January 2012 through 2 February 2012
ER -