@inproceedings{6cde733c15e740f986eebae8e976f4c5,
title = "Ultra thin Al2O3 passivation for hetero-junction Si solar cell",
abstract = "This work focuses on ultra thin (≤ 1nm) Al2O3 passivation for silicon hetero-junction solar cell. We developed a post annealing process compatible with the hetero-junction structure. We accomplished effective minority lifetime over 3 ms and implied open circuit voltages over 700 mV using a 10 nm thick Al2O3. To promote carrier transportation across the Al2O3 layer we had to reduce the layer thickness by a factor of 10. The 1 nm thin layer alone provides very poor passivation as demonstrated by the low effective minority carrier lifetime (50μs) and low implied open circuit (590mV). To improve both passivation and carrier transportation, a ultra thin stack of SiO2-Al2O3 (1.7 nm/1 nm) was developed successfully and effective minority carrier lifetimes up to 350 μs and implied open circuit voltage up to 648mV were demonstrated without post annealing optimization.",
keywords = "AlO passivation, hetero-junction, silicon solar cell, ultra thin AlO",
author = "Sangpyeong Kim and Pradeep Balaji and Andre Augusto and Stuart Bowden and Honsberg, \{Christiana B.\}",
note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 46th IEEE Photovoltaic Specialists Conference, PVSC 2019 ; Conference date: 16-06-2019 Through 21-06-2019",
year = "2019",
month = jun,
doi = "10.1109/PVSC40753.2019.8980907",
language = "English (US)",
series = "Conference Record of the IEEE Photovoltaic Specialists Conference",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "2684--2687",
booktitle = "2019 IEEE 46th Photovoltaic Specialists Conference, PVSC 2019",
}