Tuning the permeability of permalloy films for on-chip inductor applications

Tawab Dastagir, Wei Xu, Saurabh Sinha, Hao Wu, Yu Cao, Hongbin Yu

Research output: Contribution to journalArticlepeer-review

69 Scopus citations


In this work, we demonstrate that the permeability of 1 μm thick NiFe/Cr multilayer films can be tuned by varying the thickness of individual NiFe layers while keeping the total multilayer film thickness constant. Our results show that the permeability can be increased from 170 to 650 by varying the NiFe thicknesses from 100 to 50 nm. The thickness dependant permeability variation was attributed to the presence of stripe domains, as examined by hysteresis measurements and magnetic force microscope imaging. Films with thinner NiFe layers coupled with on-chip spiral inductors enable an inductance increase by a factor of 6.

Original languageEnglish (US)
Article number162506
JournalApplied Physics Letters
Issue number16
StatePublished - Oct 18 2010

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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