Three-dimensional high-resolution reconstruction of polarization in ferroelectric capacitors by piezoresponse force microscopy

B. J. Rodriguez; A. Gruverman; A. I. Kingon; R. J. Nemanich; J. S. Cross

doi:10.1063/1.1638889

Three-dimensional high-resolution reconstruction of polarization in ferroelectric capacitors by piezoresponse force microscopy

B. J. Rodriguez, A. Gruverman, A. I. Kingon, R. J. Nemanich, J. S. Cross

Research output: Contribution to journal › Article › peer-review

91 Scopus citations

Abstract

A combination of vertical and lateral PFM revealed the domain orientation of the underlying PZT thin film and allowed mapping of the three-dimensional polarization of (111)-oriented 1x1.5-μm² PZT capacitors. It was found that the poled capacitors, which appear as uniformly polarized in VPFM, were in fact in a polydomain state as was detected by LPFM. Despite the polycrystallinity of the PZT layer, regions larger than the average PZT grain size were found to have the same polarization orientation.

Original language	English (US)
Pages (from-to)	1958-1962
Number of pages	5
Journal	Journal of Applied Physics
Volume	95
Issue number	4
DOIs	https://doi.org/10.1063/1.1638889
State	Published - Feb 15 2004
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy(all)

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abstract = "A combination of vertical and lateral PFM revealed the domain orientation of the underlying PZT thin film and allowed mapping of the three-dimensional polarization of (111)-oriented 1x1.5-μm2 PZT capacitors. It was found that the poled capacitors, which appear as uniformly polarized in VPFM, were in fact in a polydomain state as was detected by LPFM. Despite the polycrystallinity of the PZT layer, regions larger than the average PZT grain size were found to have the same polarization orientation.",

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AU - Gruverman, A.

AU - Kingon, A. I.

AU - Nemanich, R. J.

AU - Cross, J. S.

PY - 2004/2/15

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N2 - A combination of vertical and lateral PFM revealed the domain orientation of the underlying PZT thin film and allowed mapping of the three-dimensional polarization of (111)-oriented 1x1.5-μm2 PZT capacitors. It was found that the poled capacitors, which appear as uniformly polarized in VPFM, were in fact in a polydomain state as was detected by LPFM. Despite the polycrystallinity of the PZT layer, regions larger than the average PZT grain size were found to have the same polarization orientation.

AB - A combination of vertical and lateral PFM revealed the domain orientation of the underlying PZT thin film and allowed mapping of the three-dimensional polarization of (111)-oriented 1x1.5-μm2 PZT capacitors. It was found that the poled capacitors, which appear as uniformly polarized in VPFM, were in fact in a polydomain state as was detected by LPFM. Despite the polycrystallinity of the PZT layer, regions larger than the average PZT grain size were found to have the same polarization orientation.

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Three-dimensional high-resolution reconstruction of polarization in ferroelectric capacitors by piezoresponse force microscopy

Abstract

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