The effect of step-flow growth on the surface morphology and optical properties of thick diamond films

A. M. Fischer; A. Bhattacharya; A. Hardy; T. A. Grotjohn; F. A. Ponce

doi:10.1016/j.diamond.2023.110507

The effect of step-flow growth on the surface morphology and optical properties of thick diamond films

A. M. Fischer, A. Bhattacharya, A. Hardy, T. A. Grotjohn, F. A. Ponce

Physics

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

Thick diamond films are needed for high power device applications. One approach is to grow via the step-flow growth mode on miscut substrates. In this paper we correlate variations of surface morphology and optical properties of a 250 μm-thick undoped diamond layer, grown at a rate of 10.4 μm/h, on a (001) diamond substrate with a miscut angle of 10 degrees towards a <010> direction. The epilayer surface comprises regions with island growth on (001) planes, and regions parallel to the miscut substrate surface exhibiting step-bunching and faceting and resulting in various degrees of surface roughness. The optical properties exhibit a combination of sharp and broad luminescence peaks, which are found to be specific to growth morphology and to the nitrogen content in the near-surface region.

Original language	English (US)
Article number	110507
Journal	Diamond and Related Materials
Volume	140
DOIs	https://doi.org/10.1016/j.diamond.2023.110507
State	Published - Dec 2023

Keywords

Faceting
Optical properties
Step-flow growth
Surface morphology
Thick diamond film

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
General Chemistry
Mechanical Engineering
General Physics and Astronomy
Materials Chemistry
Electrical and Electronic Engineering

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10.1016/j.diamond.2023.110507

Cite this

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title = "The effect of step-flow growth on the surface morphology and optical properties of thick diamond films",

abstract = "Thick diamond films are needed for high power device applications. One approach is to grow via the step-flow growth mode on miscut substrates. In this paper we correlate variations of surface morphology and optical properties of a 250 μm-thick undoped diamond layer, grown at a rate of 10.4 μm/h, on a (001) diamond substrate with a miscut angle of 10 degrees towards a <010> direction. The epilayer surface comprises regions with island growth on (001) planes, and regions parallel to the miscut substrate surface exhibiting step-bunching and faceting and resulting in various degrees of surface roughness. The optical properties exhibit a combination of sharp and broad luminescence peaks, which are found to be specific to growth morphology and to the nitrogen content in the near-surface region.",

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AU - Fischer, A. M.

AU - Bhattacharya, A.

AU - Hardy, A.

AU - Grotjohn, T. A.

AU - Ponce, F. A.

PY - 2023/12

Y1 - 2023/12

N2 - Thick diamond films are needed for high power device applications. One approach is to grow via the step-flow growth mode on miscut substrates. In this paper we correlate variations of surface morphology and optical properties of a 250 μm-thick undoped diamond layer, grown at a rate of 10.4 μm/h, on a (001) diamond substrate with a miscut angle of 10 degrees towards a <010> direction. The epilayer surface comprises regions with island growth on (001) planes, and regions parallel to the miscut substrate surface exhibiting step-bunching and faceting and resulting in various degrees of surface roughness. The optical properties exhibit a combination of sharp and broad luminescence peaks, which are found to be specific to growth morphology and to the nitrogen content in the near-surface region.

AB - Thick diamond films are needed for high power device applications. One approach is to grow via the step-flow growth mode on miscut substrates. In this paper we correlate variations of surface morphology and optical properties of a 250 μm-thick undoped diamond layer, grown at a rate of 10.4 μm/h, on a (001) diamond substrate with a miscut angle of 10 degrees towards a <010> direction. The epilayer surface comprises regions with island growth on (001) planes, and regions parallel to the miscut substrate surface exhibiting step-bunching and faceting and resulting in various degrees of surface roughness. The optical properties exhibit a combination of sharp and broad luminescence peaks, which are found to be specific to growth morphology and to the nitrogen content in the near-surface region.

KW - Faceting

KW - Optical properties

KW - Step-flow growth

KW - Surface morphology

KW - Thick diamond film

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The effect of step-flow growth on the surface morphology and optical properties of thick diamond films

Abstract

Keywords

ASJC Scopus subject areas

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