Surface stress effects on the thermodynamics of epitaxy

R. C. Cammarata, Karl Sieradzki

Research output: Contribution to journalArticlepeer-review


An analysis of the thermodynamics of epitaxy in thin films is presented which includes the effects of the surface stresses of the free surface and the film-substrate interface. It is shown that these effects, which are usually ignored in the theory of epitaxy, can have a major influence on both the critical thickness for epitaxy and on the partitioning of the misfit strain between the volume elastic strain and interface dislocations.

Original languageEnglish (US)
Pages (from-to)815-817
Number of pages3
JournalJournal of Electronic Materials
Issue number10
StatePublished - Oct 1991
Externally publishedYes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • General Materials Science
  • Electronic, Optical and Magnetic Materials
  • Physics and Astronomy (miscellaneous)


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