Surface stress effects on the critical film thickness for epitaxy

R. C. Cammarata, K. Sieradzki

Research output: Contribution to journalArticlepeer-review

39 Scopus citations


An analysis of the critical thickness dependence on misfit for epitaxy is presented including effects due to surface stresses. It is shown that these surface stress effects, which have not been included in previous theories of epitaxy, can have a major influence on the critical thickness, especially for relatively large misfits. A simple model incorporating effects due to compressive surface stresses is given which, compared to previous theories, predicts significantly larger (smaller) critical thicknesses when the stress-free lattice parameter of the film is greater (less) than the lattice parameter of the substrate.

Original languageEnglish (US)
Pages (from-to)1197-1198
Number of pages2
JournalApplied Physics Letters
Issue number12
StatePublished - 1989
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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